Correlation Between Structural and Optical Properties of Nanocrystal Particles Prepared at Low Temperature Plasma-Enhanced Chemical Vapor Deposition
Abstract
We have synthesized poly-Si films with controlled size distribution of nanocrystals and sufficient luminescent properties. The correlation between structural and optical properties of the poly-Si films allows us to determine the optimal deposition conditions for preparation films with high PL response with narrow width of energy.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1998
- Accession Number
- ADP012794
Entities
People
- D. Milovzorov
- S. Hasegawa
- T. Inokuma
- Y. Kurata
Organizations
- Kanazawa University