Correlation Between Structural and Optical Properties of Nanocrystal Particles Prepared at Low Temperature Plasma-Enhanced Chemical Vapor Deposition

Abstract

We have synthesized poly-Si films with controlled size distribution of nanocrystals and sufficient luminescent properties. The correlation between structural and optical properties of the poly-Si films allows us to determine the optimal deposition conditions for preparation films with high PL response with narrow width of energy.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1998
Accession Number
ADP012794

Entities

People

  • D. Milovzorov
  • S. Hasegawa
  • T. Inokuma
  • Y. Kurata

Organizations

  • Kanazawa University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Absorption
  • Absorption Coefficients
  • Chemical Vapor Deposition
  • Diffractometers
  • Energy Bands
  • Flow Rate
  • Grain Size
  • Low Temperature
  • Materials
  • Nanocrystals
  • Optical Properties
  • Optoelectronic Devices
  • Raman Spectra
  • Spectra
  • Standards
  • Vapor Deposition
  • X Rays

Fields of Study

  • Materials science

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Semiconductor Device Technology
  • Thin Film Deposition Science.