Cross-Sectional Atomic Force Microscopy of ZnSe-Based Laser Diodes
Abstract
Cleaved facets of ZnBeMgSe-based lasers with different design of active region have been studied by means of the cross-sectional atomal (friction) force microscopy (AFM and LFM). A difference in function coefficients has been successfully exploited to image basic layers of the laser diodes. The Be-containing cladding layers and the waveguide area are revealed as regions of lower friction as compared to a GaAs substrate. Elastic strains accumulated at the layer boundaries are displayed via nanometer-high steps and undulations forming in the morphology of the cleaved facets. A remarkable reduction of the elastic strain in the active region containing a (Zn, Cd)Se quantum well has been found for the laser with the specially designed alternately-strained superlattice in the waveguide.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 18, 1999
- Accession Number
- ADP012910
Entities
People
- A. N. Titkov
- A. V. Ankudinov
- P. S. Kop'ev
- S V Ivanov
- T. V. Shubina
Organizations
- Russian Academy of Sciences