Deformation and Viscouse Flow in Nano-Imprinting

Abstract

The paper is concentrated on the theoretical consideration of imprinting process and of polymer flow during embossing of the master. Another activity was related to development of experimental techniques for performing imprinting.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 23, 2000
Accession Number
ADP013034

Entities

People

  • A. A. Svintsov
  • M. V. Chukalina
  • S. Si. Zaitsev
  • V. N. Matveev
  • V. V. Sirotkin

Organizations

  • Russian Academy of Sciences

Tags

DTIC Thesaurus Topics

  • Electron Beam Lithography
  • Electron Microscopes
  • Equations
  • Lithography
  • Mass Production
  • Materials
  • Mathematical Models
  • Molecular Weight
  • Nanostructures
  • Navier Stokes Equations
  • Particle Size
  • Pressure Distribution
  • Random Walk
  • Scanning Electron Microscopes
  • Self Assembled Monolayers
  • Stationary
  • Stratified Fluids

Readers

  • Computational Fluid Dynamics (CFD)
  • Nanofabrication and Microfabrication.
  • Theoretical Analysis.