GaN Uniformity Control on Multiple 3 Inch Wafer Grown in Planetary Reactors
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 23, 2000
- Accession Number
- ADP013057
Entities
People
- H. Juergensen
- H. Protzmann
- J. Soellner
- M. Heuken
- M. Luenenbuerger