Two-Dimensional Photonic Crystal Fabrication Using Fullerene Films

Abstract

The two-dimensional rectangular network has been fabricated firstly on the base of fullerene films using electron lithography. Such system shows the optical properties of the two-dimensional photonic crystal. The formed periodical structure may be transmitted easy into the semiconductor substrate by plasma etching due to the resistive properties of solid state fullerenes.

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Document Details

Document Type
Technical Report
Publication Date
Jun 23, 2000
Accession Number
ADP013065

Entities

People

  • A. V. Nashchekin
  • M. A. Gaevski
  • S. G. Konnikov
  • S. I. Nesterov
  • S. O. Kognovitsky

Organizations

  • Russian Academy of Sciences

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Composite Materials
  • Crystal Structure
  • Crystals
  • Electron Microscopes
  • Electrons
  • Fabrication
  • Fullerenes
  • Geometry
  • Ion Beams
  • Ions
  • Materials
  • Materials Processing
  • Optical Properties
  • Photonic Crystals
  • Reflection
  • Scanning Electron Microscopes
  • Two Dimensional

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.
  • Quantum Chemistry

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene