Soft Breakdown in the Bistable MOS Tunnel Structures
Abstract
The S-shape reverse-bias characteristics of MOS tunnel structure on n-Si (d < 3 nm, Nd approximately equal 10(exp16) cm(exp-3) and their post-soft-breakdown transformation are analyzed. Turn-on voltages and holding voltages are found theoretically and measured. The change of these parameters with oxide damage is suggested to reflect a complicated interplay between the injection efficiency. energy distribution of injected electrons and conductivity of an inversion layer.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 23, 2000
- Accession Number
- ADP013133
Entities
People
- A. F. Shulekin
- I. V. Grekhov
- M. I. Vexler
- S. E. Tyaginov
Organizations
- Russian Academy of Sciences