A New Technique for Fabricating Three-Dimensional Micro- and Nanostructures of Various Shapes

Abstract

We have shown that complex 3-dimensiona1 micro- and nanostructures (shells) can be formed by directional rolling up of strained thin heterofilms debonded from the substrate. A technique for controlling the shape and lacation of the structures is proposed and realized.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2001
Accession Number
ADP013151

Entities

People

  • A . Beyer
  • B. Ketterer
  • C. David
  • D. Gruetzmacher
  • V. Ya. Prinz

Organizations

  • Paul Scherrer Institute

Tags

Communities of Interest

  • Air Platforms

DTIC Thesaurus Topics

  • Electron Beam Lithography
  • Electron Beams
  • Etching
  • Fabrication
  • Films
  • Geometric Forms
  • Geometry
  • Lines (Geometry)
  • Materials
  • Mechanical Properties
  • Nanomaterials
  • Nanoscale Devices
  • Nanostructures
  • Nanotechnology
  • Shape
  • Thickness
  • Three Dimensional

Fields of Study

  • Physics

Readers

  • Atmospheric Science / Meteorology, specifically Wind Wave Turbulence.
  • Materials Science (Mechanical Engineering).
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems