Scanning Joule Expansion Microscopy as a Tool for Studying Local Heating Phenomena

Abstract

Scanning Joule expansion microscopy (SJEM) is a powerful technique enabling the generation of temperature maps of nanostructured samples. It operates by examining in detail the thermal expansion of a current-carrying structure with an atomic force microscope (AFM). The thermal expansion varies proportional to the temperature making it possible to simultaneously gen- erate topographical maps as well as thermal maps of samples. The lateral resolution of the SJEM technique (estimated to be 20 nm or better) is considerably better than that of other comparable techniques (e.g. scanning thermal microscopy with a typical resolution of 100 nm). Previously we implemented and optimized a SJEM in an existing AFM system 2. Using the SJEM technique it is possible to identify hot spots and to examine in detail the temperature profile in nanostructured materials. Here, we investigate the reliability of this technique for microelectronics related applications.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 2001
Accession Number
ADP013201

Entities

People

  • Chris Van Haesendonck
  • M. Cannaerts
  • R. J. Vullers

Organizations

  • Katholieke Universiteit Leuven - Universiteitsarchief

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Alternating Current
  • Amplifiers
  • Detection
  • Electron Beam Lithography
  • Electron Beams
  • Imaging Techniques
  • Materials
  • Microscopes
  • Microscopy
  • Optical Recording Systems
  • Quality Control
  • Recording Systems
  • Scanning
  • Technical Information Centers
  • Thermal Conductivity
  • Thermal Expansion
  • Thin Films

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Plasma Physics / Magnetohydrodynamics
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene