Stoichiometry and Atomic Concentration Depth Profiles in InAs/Si Quantum Dot Systems by Rutherford Backscattering Spectroscopy and Secondary Ion Mass Spectroscopy
Abstract
Stoichiometry and atomic concentration distributions for MBE grown systems of InAs quantum dots buried in a Si matrix has been studied using Rutherford Backscattering spectroscopy and Secondary Ion Mass Spectroscopy depth profiling. We have found a significant excess of As atoms which under elevated temperatures diffuse into the Si matrix despite of a larger ionic radius. This may affect the band alignment on the QD, matrix interface. Our findings suggest improvements office MBE growth process for InAs/Si and similar systems.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2001
- Accession Number
- ADP013205
Entities
People
- Alexander T. Wenzel
- B. Stritzker
- H. Karl
- R. Claessen
- V. N. Strocov
Organizations
- University of Augsburg