Theory of Electrostatic Probe Microscopy: A Simple Perturbative Approach
Abstract
A theoretical approach to electrostatic scanning probe microscopy is presented. We show that a simple perturbation formula, originally derived in the context of scattering theory of electronmagnetic waves can be used to obtain the capacitance and the electrostatic force between a metallic tip and an inhomogeneous dielectric sample. For inhomogeneous thin dielectric films the scanning probe signal is shown to be proportional to the convolution between an effective surface profile and a response function of the microscope. This provides a rigorous framework to address the resolution issue and the inverse problem.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2001
- Accession Number
- ADP013207
Entities
People
- J. J. Greffet
- J. J. Sáenz
- L. S. Froufe
- R. Carminati
- S. Gomez-monivas
Organizations
- Autonomous University of Madrid