Microwave Dielectric Spectroscopy of Ferroelectric Thin Films
Abstract
We devised a measurement method of microwave dielectric constants of dielectric thin films without applying electrodes. The method uses a rectangular waveguide in which the dielectric thin films prepared on a substrate are filled vertically at the center. The frequency dependence of S-parameter measured by network analyzer enables us to calculate the dielectric constant and loss factor of the films at the microwave region through simulation. We prepared Ba(0.6)Sr(0.4)TiO3 thin films on (001) MgO single crystal substrate by pulsed laser deposition (PLD), and determined their dielectric constant and loss factor at ^10GHz using this method.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 03, 2003
- Accession Number
- ADP013349
Entities
People
- Beomjin Kim
- Minki Jeong
- Sunggi Baik
- Victor Kazmirenko
- Yuri Poplavko
Organizations
- Pohang University of Science and Technology