Dielectric and Room Temperature Tunable Properties of Mg-Doped Ba(0.96)Ca(0.04)Ti(0.84)Zr(0.16)O(3) Thin Films on Pt/MgO

Abstract

Mg-doped Ba(0.96)Ca(0.04)Ti(0.84)Zr(0.16)O3 (BCTZ) thin films were fabricated on Pt/MgO substrate by metallorganic decomposition method. The structure of the films were analyzed by x-ray diffraction. The electrical measurements were performed on metal-ferroelectric-metal capacitors with platinum as the top and bottom electrode. The dielectric properties were improved after the capacitors were post annealed at 700 deg C in oxygen atmosphere for 30 min. A high dielectric constant of 504 and a dissipation factor of less than 4% was obtained at 1 MHz. The Pt/BCTZ/Pt/MgO capacitors exhibited high tunability of 55% at an applied field of 55 kV/cm.

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Document Details

Document Type
Technical Report
Publication Date
Apr 03, 2003
Accession Number
ADP013364

Entities

People

  • Elliott Philofsky
  • Lee Kammerdiner
  • T. S. Kalkur
  • Woo-chul Yi

Organizations

  • University of Colorado, at Colorado Springs

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Annealing
  • Barium
  • Barium Strontium Titanates
  • Barium Titanates
  • Capacitance
  • Capacitors
  • Critical Temperature
  • Dielectric Permittivity
  • Dielectric Properties
  • Dielectrics
  • Fabrication
  • Films
  • Frequency
  • Materials
  • Thin Films
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Thin Film Deposition Science.