Explanation of the Initial Phase Change vs. Incident Angle of the RHEED Intensity Oscillation
Abstract
Reflection high-energy electron diffraction (RHEED), which is a very widely used monitoring technique of molecular-beam-epitaxial growth processes, still has some unexplained features. An interesting example of these, the so-called t(3/2)/T phenomenon, is investigated in this paper. The first period of the intensity oscillations of RHEED shows a singular behavior. An interpretation for the initial change of the phase and of the period duration dependence on the incident angle of the electron beam using the notion of surface coherence length is given here. This particular phenomenon is satisfactorily explained in the case of a Gallium Arsenide (GaAs) (001) surface. (4 figures, 12 refs.)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 03, 2002
- Accession Number
- ADP013780
Entities
People
- Akos Nemcsics
Organizations
- Hungarian Academy of Sciences