Interfacial Layer Effects in Ba(1-x)Sr(x)TiO3 Thick Films Prepared by Plasma Spray
Abstract
The dielectric properties of high k dielectric thick films prepared by thermal spray were investigated. BaTiO3 and Ba(0.68)Sr(0.32)TiO3 thick films were deposited using plasma spray on Ag-Pd screen-printed alumina substrates. The sprayed films were predominantly polycrystalline but contained an amorphous second phase. The dielectric constants of the films decreased with decreasing film thickness in 10 approx. 60 micrometer range. This was attributed to the presence of an interfacial layer between the film and the substrate as determined by capacitance measurements. The capacitance density of the interfacial layer was determined to be approx. 2.7 nF/sq cm. The capacitance density of the interfacial layer increased to 12 nF/sq cm after post heat treatment at 500 deg. C for 20 hours.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 2003
- Accession Number
- ADP014222
Entities
People
- Bruce W Wessels
- Kipyun Ahn
- Sanjay Sampath
Organizations
- Northwestern University