Material Properties and Process Compatibility of Spin-on Nano-foamed Polybenzoxazole for Copper Damascene Process
Abstract
We have developed nano-foamed OxD which has good properties such as dielectric constant=2.2, homogeneous distributed nano pores smooth surface based on polybenzoxazole chemistry and nano-foaming technology. The nano-foamed OxD also has excellent thermal stability, chemical stability and etching property. The developed nano-foamed OxD is one of good candidates for copper damascene structure to achieve shrinking dimensions of future semi-conductor devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2003
- Accession Number
- ADP014297
Entities
People
- Akifumi Katsumura
- Hidenori Saito
- Kenzo Maejima
- Takashi Enoki