Properties of Planar Surface Wave Excited Plasma
Abstract
The properties of the planar surface wave plasma are discussed from the view point of electron heating in the plasma at the low pressure, referring to the experimental evidences. The role of the dielectric plate is considered. The plasma density profiles in the radial direction can be modified by controlling the microwave in the dielectric plate.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 20, 2003
- Accession Number
- ADP014936
Entities
People
- Masashi Kando
Organizations
- University of Shizuoka