Optical Diagnostics of Atmospheric Pressure Glow Discharge in Nitrogen with Admixture of Organosilicon

Abstract

The atmospheric pressure glow discharge in nitrogen with small admixture of different organosilicon, is compounds such as hexamethyldisilazane and hexamethyldisiloxane studied by means of emission spectroscopy. The deposited films were studied by means of indentation techniques.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jul 20, 2003
Accession Number
ADP014960

Entities

People

  • D. Trunec
  • P. Stahel
  • V. Bursikova
  • Z. Navratil

Organizations

  • Masaryk University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Barometric Pressure
  • Emission
  • Emission Spectra
  • Emission Spectroscopy
  • Films
  • Flow Rate
  • Gases
  • Glow Discharges
  • Intensity
  • Ionized Gases
  • Measurement
  • Mechanical Properties
  • Modulus Of Elasticity
  • Nitrogen
  • Spectra
  • Spectroscopy
  • Thin Films

Readers

  • Analytical Chemistry
  • Organic Chemistry
  • Pulsed Power and Plasma Physics.