Characteristics of Pulse Magnetron Discharge with Power Supply from a Capacitor Energy Storage

Abstract

The peculiarities of pulse sputtering magnetron discharge in conditions of low-voltage power supply from capacitor energy storage are considered. Discharge current-voltage characteristics is shown to depend on pulse duration. The pulse packet regime ensures stable arc-free maintenance of the discharge at long time operation.

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Document Details

Document Type
Technical Report
Publication Date
Jul 20, 2003
Accession Number
ADP014993

Entities

People

  • A. I. Kuzmichev
  • L. Jastrabik
  • P. Bohac
  • V. Yu. Kulikovsky
  • Yu. I. Melnyk

Organizations

  • Igor Sikorsky Kyiv Polytechnic Institute

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Capacitors
  • Chemical Reactions
  • Czech Republic
  • Dielectric Films
  • Electronics
  • Energy
  • Energy Storage
  • Films
  • Gases
  • Ionization
  • Ionized Gases
  • Low Voltage
  • Magnetrons
  • Materials
  • Power Supplies
  • Storage
  • Voltage

Fields of Study

  • Physics

Readers

  • Logistics and Supply Chain Management.
  • Pulsed Power and Plasma Physics.
  • Thin Film Deposition Science.