Langmuir Probe Study of the Floating Potential Fluctuations in the DC Cylindrical Magnetron Discharge

Abstract

The plasma potential fluctuations in the cylindrical magnetron discharge were measured using the Langmuir probes. The power density spectra were calculated in the range of magnetic fields 10 to 40 mT pressures 1.5 to 7 Pa and discharge currents 100 and 200 m(Angstrom).

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Document Details

Document Type
Technical Report
Publication Date
Jul 20, 2003
Accession Number
ADP015009

Entities

People

  • A. Marek
  • J. F. Behnke
  • M. Holik
  • O. Bilyk
  • P. Kudrna

Organizations

  • Charles University

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Czech Republic
  • Discrete Fourier Transforms
  • Flow Rate
  • Frequency
  • Frequency Domain
  • Gases
  • Ionized Gases
  • Langmuir Probes
  • Magnetic Fields
  • Magnetic Properties
  • Magnetrons
  • Measurement
  • Phase Shift
  • Power Spectra
  • Probes
  • Spectra
  • Technical Information Centers

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Plasma Physics.