Instabilities in Inductive Discharges with Electronegative Gases
Abstract
Relaxation oscillations in charged particle densities are seen in low-pressure electronegative inductive discharges, in the neighborhood of the transition between lower power capacitive operation and higher power inductive operation. The region of oscillatory behavior in both pressure and power increases as the plasma becomes more electronegative. Charged particle and free radical dynamics were investigated experimentally. A global model was developed which allowed to determine the parameters governing the transition to instability.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 20, 2003
- Accession Number
- ADP015027
Entities
People
- H. Abada
- J. -p. Booth
- P. Chabert
Organizations
- University of California, Berkeley