Integration Of Three-Dimensional Silicon Microtip Arrays Onto Flexible Substrates
Abstract
This proposal aims to identify a collection of optimized structural designs and novel fabrication strategies that are capable of integrating arrays of vertical silicon nanotip-based probes onto flexible, biocompatible substrates such as polyimide. First, the proposed work will begin with 3D surface nano-texturing to form various tectonic motifs onto silicon nanotips, which would lead to enhanced interfacial interactions with biological cells and tissues at the nanoscale. Second, a subsequent transfer printing technique will then separate the nanotip probes, via a controlled cracking, from the fabrication wafer, allowing its heterogeneous integration with desired flexible, biocompatible substrates. To illuminate its utility, a testbed system will be implanted onto the surface of peripheral nerves of the brain of rat models to evoke action potentials and record neuronal activity.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Dec 05, 2016
- Source ID
- FA23861614105
Entities
People
- Chi Hwan Lee
Organizations
- Air Force Office of Scientific Research
- United States Air Force
- University of Virginia