Group-IV Photonic Material Molecular Beam Epitaxy
Abstract
The objective is to acquire and rehabilitate one of the best SiGe molecular beam epitaxy (MBE) systems ever built for the creation of photonic group-IV materials. With the requested funds the team acquire the MBE system described in detail within the proposal along with all of the associated wafer preparation benches and related equipment. The MBE would be restored and its capabilities expanded to enable the growth of high-quality SiGeSn materials.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Mar 23, 2016
- Source ID
- FA95501510352
Entities
People
- Thomas E. Vandervelde
Organizations
- Air Force Office of Scientific Research
- Tufts University
- United States Air Force