A New Dual-Chamber Sputter Deposition & Magnetic Annealing System for Ultra-Compact Reconfigurable RF Magnetoelectric Antennas
Abstract
The proposal is for the acquisition of a new sputtering chamber and in-situ magnetic annealing capabilities. The capabilities are important to the deposition of multiferroic heterostructures of small sizes, which require free standing layers. The modifications to the deposition system are unique, and would add significantly to the ability to fabricate such complex multiferroic heterostructures.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jul 28, 2017
- Source ID
- FA95501710330
Entities
People
- Nian X. Sun
Organizations
- Air Force Office of Scientific Research
- Northeastern University
- United States Air Force