Development of Beta Gallium Oxide on Large Area Substrates

Abstract

?-Ga2O3 is a remarkable material as it has the combination of a large direct bandgap,exceptionally high breakdown field, and high electron mobility. Other than diamond, ?-Ga2O3has the largest bandgap of any semiconductor to show natural n-type conductivity. The overallgoal of this program is to is to develop ?-Ga2O3 on scalable substrate orientations including(001) by plasma-assisted molecular beam epitaxy (PAMBE) at UCSB. The program willspecifically focus on optimization of unintentionally doped films, n-type films via candidateshallow donors Ge and Si, and intentionally compensated films via deep acceptors such as Mg.Traps in the material will be determined by deep level spectroscopies at Ohio State University.

Document Details

Document Type
DoD Grant Award
Publication Date
Apr 09, 2018
Source ID
FA95501810059

Entities

People

  • James A. Speck

Organizations

  • Air Force Office of Scientific Research
  • United States Air Force
  • University of California, Santa Barbara

Tags

Fields of Study

  • Materials science

Readers

  • Research Science/Academic Research
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene