Developing a Hybrid SThM-SEM System with High Spatiotemporal Resolutin for Transient Thermal Characterization of Electronic Materials and Devices
Abstract
This project seeks to develop a framework for constructing a hybrid scanning electron microscopy (SEM) and scanning thermal microcopy (SThM) system with high resolutions (~ 10 nm in space, ~10 ps in time, and 10 mK in temperature) for transient thermal characterization and thermal damage analysis of electronic materials and devices. Here, we propose a two-year project to prove the concept of the hybrid SEMSThM system with unprecedented high spatiotemporal resolution (~ 10 nm in space, ~10 ps in time) and develop a high-fidelity numerical tool for experimental data analysis. This study in particular will focus on modeling thermal transport and on design.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Apr 09, 2018
- Source ID
- FA95501810086
Entities
People
- Yanbao Ma
Organizations
- Air Force Office of Scientific Research
- United States Air Force
- University of California