Physical Vapor Deposition System for Deposition of Phase-Change Materials, Metals and Dielectrics
Abstract
We plan to purchase a general purpose physical vapor deposition system that allows sputterdeposition of phase change materials, dielectrics, metal and composite material thin films. This acquisitionwill support the research activities for MURI: Development of Universal Security Theory for Evaluationand Design of Nanoscale Devices (M. Tehranipoor, M. Van Dijk, A. Gokirmak, H. Silva, D. Forte, J. Shi,Gang Qu, A. Srivastava, F. Koushanfar) as well as other fundamental studies and training of graduatestudents.As the UConn component of the MURI team, we have been working on phase change memorydevices in collaboration with IBM Watson Research laboratory, where we fabricate our devices. We haveaccess to the Harvard and Cornell nanofabrication user facilities and have lithography and etchingcapabilities at UConn. These user facilities provide the necessary support for general fabrication processessuch as metal and dielectric deposition, and patterning but cannot accommodate phase change materialsdue to cross-contamination concerns.The system we propose to purchase is a 5 magnetron source automated system that is capable ofhandling 200 mm silicon wafers and can co-sputter phase change materials with dielectrics as well as metaldielectric stacks. This system will allow us to deposit thin films of phase change materials, phase changecomposites and metal and dielectric layers, fabricate nanoscale devices and perform experimental studieson the materials and nanoscale devices. Having this physical vapor deposition system in house at UConnwill give us significantly more flexibility in materials composition and shorter turn-around times.We have the facilities and the technical expertise for electrical characterization and computationalanalysis of phase change materials and nanoscale devices in our laboratory. UConn has recently establisheda partnership with FEI, a major manufacturer of electron beam systems.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Aug 28, 2018
- Source ID
- FA95501810290
Entities
People
- Ali Gokirmak
Organizations
- Air Force Office of Scientific Research
- United States Air Force
- University of Connecticut