Electron Microscopy and Spectroscopy of 2D Hybrid Material Architectures for Terahertz (2D HyMaTer) using STEM EELS-EDS

Abstract

Use of migration enhanced encapsulated growth (MEEG), allows the control of a self terminated process, in which heteroatoms such as Ga or In intercalate between a deliberately plasma damaged epitaxial graphene layer and an underlying SiC substrate to form 2 D metals, followed by a nitridation step to create 2 D ceramics (GaN, InN). Following this step, a further step relies on using chemical vapor deposition to grow a transition metal dicalchogenide (TMD) layer on the top of the graphene stack. The proposed structure in the 2D HyMaTer proposal thus requires engineering of complex 4 5 atomic layer thick heterostructures (e,g,, SiC-Gr-GaN-Gr-WSe2) at wafer scale in order to realize the short carrier path and tunneling based switching required for novel devices operating in the Terahertz frequency regime. In order to achieve reliable growth results, the details of the synthesis at each processing step, and the atomic structure of the heterostructure must be examined at the atomic scale.

Document Details

Document Type
DoD Grant Award
Publication Date
Jan 14, 2022
Source ID
FA95501910239

Entities

People

  • Nabil Bassim

Organizations

  • Air Force Office of Scientific Research
  • McMaster University
  • United States Air Force

Tags

Fields of Study

  • Materials science

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene