Electron Microscopy and Spectroscopy of 2D Hybrid Material Architectures for Terahertz (2D HyMaTer) using STEM EELS-EDS
Abstract
Use of migration enhanced encapsulated growth (MEEG), allows the control of a self terminated process, in which heteroatoms such as Ga or In intercalate between a deliberately plasma damaged epitaxial graphene layer and an underlying SiC substrate to form 2 D metals, followed by a nitridation step to create 2 D ceramics (GaN, InN). Following this step, a further step relies on using chemical vapor deposition to grow a transition metal dicalchogenide (TMD) layer on the top of the graphene stack. The proposed structure in the 2D HyMaTer proposal thus requires engineering of complex 4 5 atomic layer thick heterostructures (e,g,, SiC-Gr-GaN-Gr-WSe2) at wafer scale in order to realize the short carrier path and tunneling based switching required for novel devices operating in the Terahertz frequency regime. In order to achieve reliable growth results, the details of the synthesis at each processing step, and the atomic structure of the heterostructure must be examined at the atomic scale.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jan 14, 2022
- Source ID
- FA95501910239
Entities
People
- Nabil Bassim
Organizations
- Air Force Office of Scientific Research
- McMaster University
- United States Air Force