(DURIP) HIGHLY RELIABLE AND MULTI-FUNCTIONAL COLD-WALL ULTRA-HIGH-VACUUM CHEMICAL-VAPOR DEPOSITION SYSTEM FOR ADVANCED SIGESN DEVELOPMENT
Abstract
The emerging Group-IV alloy SiGeSn materials have many unique optoelectronic properties. The successful development of SiGeSn could make significant contributions toward to addressing the current defense challenges in the fields of Future Infrared Imaging and Future Integrated Photonics and therefore bring tremendous impacts for DoD future sensor and electronics. Although substantial progress has been made for both SiGeSn material and device development, grand challenges still exist from the basic material science perspective. In this project, the PI requests funding to acquire parts to upgrade a unique UHV-CVD system at UA, which will be dedicated to address SiGeSn material development challenges with its unique growth and diagnostic capabilities. The upgrading work includes two parts: i) Purchasing two epitaxy center/station units and supporting parts to compose a reliable operation system so that the UHV-CVD will have minimal down time; ii) Adding new functions such as plasma diagnostics, gas species analysis, in-situ Sn droplet formation monitoring, new gas entry for atomic hydrogen enhancement, and additional gases for Sn droplet etching. A new management plan is proposed by taking into account the need of high reliability operation. This unique growth facility will also create new capabilities for DoD including i) Group-IV quantum materials such as ?-Sn and high Sn SiGeSn, ii) Rhombohedral phase SiGe on sapphire for radiation hardness electronics, and iii) Interface quantum material for SiGe on lattice matched transition metal oxide that can form an entirely new class of semiconductor-on-insulator. The project also has tremendous education impacts for UA undergraduate and graduate research.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Aug 12, 2021
- Source ID
- FA95502010168
Entities
People
- Shui-Qing Yu
Organizations
- Air Force Office of Scientific Research
- United States Air Force
- University of Arkansas System