(FY21-DURIP) VARIABLE TEMPERATURE HIGH-FREQUENCY MICROPROBE AND SCANNING ANODE FIELD EMISSION SYSTEM FOR VACUUM INTEGRATED NANOELECTRONICS

Abstract

A Field Emitter Characterization System for Vacuum Integrated Nanoelectronics is proposed. The system will allow the evaluation of Vacuum Field Effect Transistors (VFETs) with special designs and appropriate materials based on silicon and wide bandgap (Eg) semiconductors. These approaches are compatible with currently available nanofabrication technology and allow easy circuit integration and circuit operation under harsh environment with rapid recovery of logic and high-frequency characteristics upon interference. Unique approaches based on velocity saturation in Si-SiGe field emitter arrays (FEAs) will be explored using the proposed system to overcome non-uniformity and low current capability of Field Emitter Arrays (FEAs). The system will permit temperature dependent measurements, testing under variable optical excitation, control of gas environment and precise electrically actuated positioning.

Document Details

Document Type
DoD Grant Award
Publication Date
Mar 07, 2023
Source ID
FA95502110444

Entities

People

  • Dimitris Pavlidis

Organizations

  • Air Force Office of Scientific Research
  • Florida International University
  • United States Air Force

Tags

Fields of Study

  • Physics

Readers

  • Plasma Physics.
  • Semiconductor Device Technology
  • Software Engineering

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems