(DURIP) METAL THIN FILM FABRICATION AND CHARACTERIZATION FOR INTERLOCKING COMPLIANT MECHANICAL METAMATERIALS AND MICRO ELECTRONICS HETEROGENOUS INTEGRATION RESEARCH

Abstract

The objective of this proposal is to establish an experimental system at the University of Hawaii at Manoa (UH) for fundamental structural mechanics research in compliant mechanical metamaterials and heterogeneous integration using metal thin films as a model system. The instrumentation proposed via this DURIP request will integrate with existing equipment at UH to establish metal microfabrication capabilities, and then allow structural and mechanical characterization of freestanding metal thin film structures at the microscale and nanoscale. The proposed instrumentation system consists of readily acquired components and technologies, namely a physical vapor deposition tool, a nanoindenter, and a digital microscope, that can be operated in currently existing facilities at UH. Together, these tools will support current AFOSR funded research by providing a basis for high-speed experimental data collection and model validation concerning the emergent properties of large-deformation material shells integrated within interlocking joints and mechanical adhesion surfaces. By making this system available to the UH Manoa campus, it will also enable research and education in microfabrication, large deformation mechanics, and micromechanics, allowing hands-on

Document Details

Document Type
DoD Grant Award
Publication Date
Mar 07, 2023
Source ID
FA95502210161

Entities

People

  • Joseph S Brown

Organizations

  • Air Force Office of Scientific Research
  • United States Air Force
  • University of HawaiĘ»i System

Tags

Fields of Study

  • Physics

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Research Science/Academic Research
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems