NONDESTRUCTIVE EVALUATION OF INTEGRATED CIRCUITS USING EXCITONIC PROBES
Abstract
In two-dimensional (2D) semiconductors, the Coulombic field lines extend well outside the 2D material. As they bind an electron and a hole to form an exciton inside the 2D material, the external field lines induce excitons that are sensitive to the local energy and spatial distribution of the defects outside the 2D system. In this program, we will exploit signatures in energetics and spatial energy transport of excitons and their higher order correlation states such as biexcitons (exciton molecule), trions or dropletons (tiny electron–hole droplets) in transition metal dichalcogenides to nondestructively evaluate nanofabrication processes of integrated circuits (ICs).
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Apr 20, 2023
- Source ID
- FA95502210530
Entities
People
- Parag B. Deotare
Organizations
- Air Force Office of Scientific Research
- Board of Regents of the University of Michigan
- United States Air Force