Electron beam lithography system for engineering novel quantum circuits, architectures, and materials for superconducting quantum computing

Abstract

In addition to research in quantum information science, Rutgers has a strong program in condensed matter physics carrying out a host of nanoscience and nanoengineering-related projects supported by the AFOSR, NSF, DoE, and NASA whose synergy was crucial for developing the nanofabrication infrastructure at Rutgers. The condensed matter research in this proposal will be led by Prof. Eva Andrei, a pioneer of scanning probe and transport studies of 2D materials, including the first observation of the fractional quantum Hall effect in graphene and novel electronic properties and van-Hove singularities in twisted bilayer graphene. Her group will use the new nanolithography system to explore devices based on graphene, topological materials, and van-der-Waals and topological insulator-superconductor heterostructures, both for fundamental condensed matter research and potential QIS applications. Over the past two decades, Rutgers researchers have performed cutting-edge research in QIS and CMP despite the limitations of an increasingly outdated nanolithography tool - an FEI SIRION scanning electron microscope with a Nabity nanopattern generation system. This instrument, while critical to the success of numerous projects supported by the DoD and other federal agencies, is approaching the end of its life cycle and needs to be urgent replaced. The proposed acquisition of Elionix ELS-BODEN 50kV electron beam lithography system will strongly enhance Rutgers research in quantum information science, nanoscience, and condensed matter physics. It will also prepare Rutgers students to pursue careers in areas important to national defense, including nanoscience and engineering, quantum technologies, and quantum computing.

Document Details

Document Type
DoD Grant Award
Publication Date
Mar 06, 2024
Source ID
FA95502310373

Entities

People

  • Srivatsan Chakram Sundar

Organizations

  • Air Force Office of Scientific Research
  • Rutgers University
  • United States Air Force

Tags

Fields of Study

  • Physics

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Research Science/Academic Research

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene
  • Quantum Computing