Monolithically 3D integrated 2D-3D heterostructures for multispectral remote sensing

Abstract

Optoelectronic sensors have been widely employed in various applications including visible cameras, night vision, thermal imaging, and UV detection. Recently, the combination of such multispectral data attracts great interest for advancing emerging technologies such as self-navigation, surveillance, military and AIoT systems. However, this requires a materials and sensing platform that can detect this wide spectral range simultaneously with minimal size, weight, and power (SWaP). The monolithic 3D integration of freestanding single-crystalline membranes with each layer detecting one segment of the spectrum is one of the most promising technologies to achieve a multispectral remote sensing system with minimal SWaP. In this regard, a fundamental breakthrough is required in both material growth and structural integration technologies that allows integration of multi-stacked electronic and optoelectronic components on a single platform. Here, we propose a novel approach to demonstrate this advanced multimodal remote sensing system via monolithic integration of single crystalline membranes. This innovative platform for multimodal sensing is based on the recent development of unique 2D- and 3D-material growth technologies by the PIs teams, namely confined 2D growth on amorphous substrate and dislocation reduction of 3D epilayers by 2D layer. This project will include (a) a theoretical study of 2D and 3D epitaxy; (b) the growth of single-crystalline 3D-2D films on an amorphous substrate at low temperature and characterization in an integrated system and (c) confirmation of the functionality of a monolithically 3D integrated multimodal remote sensing platform for UV, visible and IR signal detection.

Document Details

Document Type
DoD Grant Award
Publication Date
Feb 06, 2025
Source ID
FA95502410336

Entities

People

  • Jeehwan Kim

Organizations

  • Air Force Office of Scientific Research
  • Massachusetts Institute of Technology
  • United States Air Force

Tags

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics