Atomic Layer Deposition for Superconductor-Semiconductor Hybrid Quantum Devices
Abstract
We propose to acquire a plasma-enhanced atomic-layer deposition (PEALD) system to support our urgent need to fabricate superconductor-semiconductor hybrid quantum devices at the University of Notre Dame. This tool is essential for accomplishing the research goal in our DOD-funded project, Long-coherence high-fidelity electron qubits on quantum solids . It will also overall strengthen the on-campus research capabilities in quantum information science (QIS) for potential future DOD projects. We recently pioneered a novel quantum information platform by trapping single electrons on ultraclean solid-neon surfaces and manipulating their motional (charge) states by microwave photons in superconducting quantum circuits. The observed charge-qubit coherence time has reached 0.1ms, and single-qubit gate fidelity has exceeded 99.97percent, outperforming all the traditional charge qubits and rivaling the best superconducting transmon qubits to date. Moreover, it is theoretically predicted that spin qubits in this system will show even better performance. To quickly advance this emerging direction, a state-of-the-art PEALD system on our campus dedicated to the relevant QIS research is imperative. It will significantly shorten the turnaround time between the device simulation, fabrication, and characterization. In the near term and medium term, we will use this tool to grow near-epitaxial-quality high kinetic-inductance (KI) superconducting thin films. These films are critical to host single-crystalline solid neon, enhance electron-photon coupling strength, and produce superconducting through-silicon-vias (TSVs) for electron transport. All of these are crucial milestones in the effort to scale up the system in 2D and 3D for quantum computing. In the long term, we plan to use this tool to fabricate piezoelectric and high-index dielectric phononic and photonic quantum devices. These devices could coherently bridge the quantum information in electron qubits in the microwave domain with that in other quantum information carriers (e.g., defect centers and rare-earth ions) in the optical domain. In summary, a PEALD system will largely facilitate our systematic development across all major areas of QIS based on our demonstrated novel qubit platform- quantum computing, sensing, transduction, and communication. The University of Notre Dame does not yet have an operational superconductor-semiconductor thin-film deposition system dedicated to QIS. Introducing this tool on campus will not only benefit the PI, co-PI, and collaborators DOD-funded projects but also offer tremendous opportunities to educate motivated students from interdisciplinary areas into future quantum scientists and engineers and contribute to the entire quantum workforce in the US.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Feb 06, 2025
- Source ID
- FA95502510035
Entities
People
- Dafei Jin
Organizations
- Air Force Office of Scientific Research
- United States Air Force
- University of Notre Dame