Scalable roll-to-roll manufacturing of flexible Si thin films at atmospheric pressure using cyclohexasilane-based liquid silicon precursors
Abstract
The author has developed a cost effective route to Si6H12, cyclohexasilane, and proposes to use it as a precursor to thin film silicon solar cells using an aerosol assisted atmospheric pressure chemical vapor deposition process (AA APCVD). He has strong preliminary data suggesting reasonable deposition rates for nanocrystalline silicon films with acceptable electronic properties. In this proposal he proposes to scale synthesis of the precursor and make P, I, and N layers using AA APCVD, in which the doping is with miscible boron or phosphorus containing compounds.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jan 26, 2017
- Source ID
- N000141510065
Entities
People
- Philip Boudjouk
Organizations
- North Dakota State University
- Office of Naval Research
- United States Navy