Acquisition of a Photomask Aligner for Design and Fabrication of Uncooled Thermal Detectors for Research
Abstract
This grant proposal proposes to acquire a Photomask Aligner (PMA), a tool to perform photolithographyfor fabricating electronic and other devices by patterning thin film layer(s). The proposed PMA will beused to perform the photolithography from both front and backside of the substrate - suitable for microelectro mechanical systems (MEMS) and nano electro mechanical systems (NEMS) devices. The PMAwill be installed in the Optical Science Center for Applied Research (OSCAR) building of Delaware StateUniversity (DSU), a brand new $18M research facility which was opened in Fall 2015.The proposed PMA will be used to perform microfabrication of various electrical and optical devices. The PMA will contribute to successful realization of various ongoing and future research projects, whichincludes Office of Naval Research supported Young Investigator Award project ~ design and fabrication of nano machined pyroelectric detectors with ultra-low thermal conductance. The proposed equipment will also help to accomplish another grant proposal submitted to the Department of Defense (DoD) for rapid detection pathogens to encounter bio-threats. The acquisition of the proposed PMA will have significant impacts on science and technology education, infrastructure, and diversity at DSU, a historically-black university with a large pool of talented students who have been traditionally underrepresented in STEM field. The PMA will enhance the research infrastructure and research capabilities in electronic processing area at OSCAR facility of DSU, a core shared research facility. The proposed equipment will be fully integrated into various DSU courses, exposing our students for hands on training in fabrication area. The inclusion of the proposed equipment will complement a sputtering system, a profilometer and scanning electron microscope to build the capabilities of electronic device fabrications at DSU. The acquisition will significantly impact current changes in the research and education at DSU.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Sep 23, 2016
- Source ID
- N000141612727
Entities
People
- Mukti Rana
Organizations
- Delaware State University
- Office of Naval Research
- United States Navy