A Micro-Raman Thermography System for High Spatial Resolution Thermal Characterization of Microelectronic Devices and their Thermal Management Solutio

Abstract

The micro-Raman thermography system will be used to measure the local temperature rise in high power microelectronic devices and two-phase microfluidic systems. The proposed system will significantly enhance ongoing ONR-funded research efforts on thin film evaporation and flow boiling for ultra-high heat flux dissipation, as well as DARPA-funded work on high power GaN power amplifiers and AFOSR-funded work on novel thermal and electronic materials. When combined with existing equipment, the requested components will allow for optical temperature measurements with a #1 #m spatial, #30 ns temporal, and 5 ~C temperature resolution.

Document Details

Document Type
DoD Grant Award
Publication Date
Mar 03, 2017
Source ID
N000141712363

Entities

People

  • Evelyn Wang

Organizations

  • Massachusetts Institute of Technology
  • Office of Naval Research
  • United States Navy

Tags

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics