Large Area Deposition of Multi-layer Superconducting Oxide Thin Films

Abstract

We propose the acquisition of a custom one-of-a-kind thin film deposition instrument that will enable high quality large area depositions of electronics grade high temperature superconductors. This machine will help found a process line for HTS electronics at UC Riverside. This will enhance education at our University by providing a venue where academic, government and corporate researchers from across the country can simulate, design, build, and test their own superconducting circuits.

Document Details

Document Type
DoD Grant Award
Publication Date
Jul 01, 2019
Source ID
N000141812253

Entities

People

  • Shane A Cybart

Organizations

  • Office of Naval Research
  • United States Navy
  • University of California Regents

Tags

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Research Science/Academic Research
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene