Reflection High Energy Electron Diffraction
Abstract
For the purchase and installation of a reflection high energy electron diffraction (RHEED) system in the Jaramillo research group at MIT. This system will be installed on an existing molecular beam epitaxy (MBE) chamber that was designed for the deposition of chalcogenide thin films, including phase-change electronic materials. This RHEED system will directly benefit the work to be carried out under the project entitled “New phase change materials for photonics: from in-silico design to novel device concepts”, which has been selected for funding by the Office of Naval Research (ONR) under the Multidisciplinary University Research Initiative (MURI) program (Topic 11, Research Topic Chief: Dr. Brian R. Bennett, Division 312, Electromagnetic Materials Program). This project will require making chalcogenide thin films by MBE with high levels of phase, morphology, and defect control. RHEED is the most commonly used in situ diagnostic technique for MBE, and is indispensable for achieving good control over film morphology.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jul 01, 2019
- Source ID
- N000141812746
Entities
People
- Rafael Jaramillo
Organizations
- Massachusetts Institute of Technology
- Office of Naval Research
- United States Navy