Microsystem Analyzer for Advanced Micromachined Sensors at The University of Texas at Austin

Abstract

This DURIP is provided for the acquisition of a Micro System Analyzer for dynamic characterization of advanced micromachined sensors and actuators. The system combines Laser Doppler Vibrometry (LDV) and static white light topography measurement capabilities and enables both in-plane andout-of-plane observation of motion and mode shapes, with picometer resolution, to capture complete microstructural response. UT-Austin has many active defense-sponsored research programs that the instrumentation will greatly enhance and accelerate. The PI develops unconventional and biologically-inspired fluid-flow, acoustic, and seismic sensors with complex vibration mode shapes. These projects include shear-stress and skin-friction sensors, fly-inspired microphones, sensors for ultrasonic sniper detection and source localization, and underwater acoustic vector sensors. All of these sensors employ unconventional micromachined structures with complex modes of vibration, and the rigorous observation and quantification of these modesis anticipated to facilitate fundamental breakthroughs and accelerate the development of these technologies for DoD applications. Newer and collaborative DoD-relevant projects include straintronic-based two-dimension field-effect transistors (2-D FETs). The equipment will be a shared resource, and other users at UT-Austin and UT Applied Research Laboratories (ARL) willuse the tool for diverse defense-funded research. The instrument is anticipated to be used in over five courses at UT-Austin. Further, the projects above support several undergraduate research assistants and the acquisition will enhance these educational experiences as well.

Document Details

Document Type
DoD Grant Award
Publication Date
Sep 04, 2018
Source ID
N000141812823

Entities

People

  • Neal A. Hall

Organizations

  • Office of Naval Research
  • United States Navy
  • University of Texas at Austin

Tags

Readers

  • Fluid Dynamics.
  • Research Science/Academic Research

Technology Areas

  • Directed Energy