CMOS compatible gas sensor for detection and classification of volatile organic compounds - VOCs
Abstract
The need for reliable and miniature gas sensors, as a means of alert against the dispersion of hazardous materials (whether as a result of e.g. an industrial accident, a terror event or even environmental circumstances) does exist and the importance of immediate on-the -spot detection increases continuously. A new generation of integrated sensors e.g. in wearables or personal assistants (e.g. smartphones) is evolving as elementary building blocks for the internet of things (IoT).In this proposal, we will develop study and test robust nanoscale gas sensors suitable for mass production based on the electrostatically formed nanowire (EFN) concept. The main outcome of the project will be a Sensitive & Selective Gas Sensor: SENSE-GAS which will be fabricated using very large scale integration (VLSI) technologies. The SENSE-GAS is based on the electrostatically formed nanowire (EFN) device which is nano-scale size channel of a transistor induced by four biasing gates. The gas sensing is achieved by analyte molecules that change the channel surface potential and as a result modulate the drain-source current. Gas selectivity will be achieved by a novel concept termed ~electrostatic selectivity~ that combines device surface electric fields with pattern recognition algorithms. It is based on the EFN surface fringing electric fields, which were found to have a very pronounced effect on the adsorption of analyte gas molecules. We will make use of this effect, and the multi-gate structure of the EFN, to develop a highly accurate selective and sensitive gas sensor.The SENSE-GAS will be designed to detect molecules such as SF6, and Dibutylsulfide (mustard gas), triethylphosphate (organophosphate nerve agent and pesticide) and Dinitrotoluene (explosive TNT). Once a specific application is defined, our generic technology will be adjusted accordingly. The emphasis will be to achieve high sensitivity, broad dynamic range and high selectivity towards the above molecules and similar ones that are of relevance and interest to US Navy.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Nov 09, 2018
- Source ID
- N000141912010
Entities
People
- Yossi Rosenwaks
Organizations
- Office of Naval Research
- Tel Aviv University
- United States Navy