Development of an integrated system for precise nanoscale layer-by-layer alignment with in-situ characterizations
Abstract
We request in this proposal the funding for development of an integrated system for precise alignment, in-situ micro-Raman, and in-situ optical characterizations during the fabrication of multilayer nanoscale and microscale superstructures in a layer-by-layer manner. The proposed system will be state-of-the-art in controllable fabrications of moir~ metasurfaces and metamaterials with advanced characterization of the structural and optical properties offunctional materials. To achieve the proposed system, we request funding ($356,893 in total) for the following 3 sub-systems: (1) Precise alignment system ($219,915.55); (2) Fourier transform infrared (FTIR) spectroscopy with microscale focus ($41,362.79); (3) micro-Raman spectrometer ($95,615). All the components will be properly installed on a single Newport optical table and integrated with a Nikon microscope in our lab.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Jun 13, 2019
- Source ID
- N000141912442
Entities
People
- Yuebing Zheng
Organizations
- Office of Naval Research
- United States Navy
- University of Texas at Austin