Development of an integrated system for precise nanoscale layer-by-layer alignment with in-situ characterizations

Abstract

We request in this proposal the funding for development of an integrated system for precise alignment, in-situ micro-Raman, and in-situ optical characterizations during the fabrication of multilayer nanoscale and microscale superstructures in a layer-by-layer manner. The proposed system will be state-of-the-art in controllable fabrications of moir~ metasurfaces and metamaterials with advanced characterization of the structural and optical properties offunctional materials. To achieve the proposed system, we request funding ($356,893 in total) for the following 3 sub-systems: (1) Precise alignment system ($219,915.55); (2) Fourier transform infrared (FTIR) spectroscopy with microscale focus ($41,362.79); (3) micro-Raman spectrometer ($95,615). All the components will be properly installed on a single Newport optical table and integrated with a Nikon microscope in our lab.

Document Details

Document Type
DoD Grant Award
Publication Date
Jun 13, 2019
Source ID
N000141912442

Entities

People

  • Yuebing Zheng

Organizations

  • Office of Naval Research
  • United States Navy
  • University of Texas at Austin

Tags

Readers

  • Nanofabrication and Microfabrication.
  • Nanoscale Plasmonic Nanotechnology
  • Research Science/Academic Research

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems