Upgrade to Ion Beam Sputtering System

Abstract

The accomplishments in power scaling of high-energy lasers in the 1 m wavelength range are in most part attributed to advances in interference coatings with absorption and scattering losses of less than 10 ppm and high laser damage resistance.Our group at Colorado State University has developed unique expertise in the engineering of interference coatings for high-energy lasers operating at wavelengths in the 0.8-2 m wavelength range. We have also the metrology necessary to assess absorption and scattering losses, spectral response and laser damage performance for pulse durations from picoseconds to nanoseconds. Through these efforts supported by the DoD Office of Naval Research, we have demonstrated superior quality interference coatings specifically designed for the Navy 1 m Free Electron Laser, for continuous wave, nanosecond and picosecond pulse duration lasers operating at around 1 m. Besides advancing the state-of-the-art in interference coating technology, these research efforts contributed to educating and training a cadre of students some of whom have joined industry and are part of the Directed Energy community.Achieving high quality in the materials that make up the coatings is a challenge. However, comprehensive studies by our group have shown that this is in most part the result of the optimization of the ion beam deposition process that is used to grow single and multilayer dielectric oxides. The SPECTOR dual ion beam deposition system, donated by Veeco to Colorado State University in 2003, is now 20 years old, double the age of stipulated replacement by Veeco. In fact, Veeco does not maintain this t system any longer. This proposal request support to upgrade the Veeco SPECTOR with new source drivers, digital gas flow controllers and new software that will enable error-free operation of the deposition process. As part of the proposed upgrade we also plan to equip the instrument with a residual gas analyzer that will communicate with the system for monitoring gas pressure instead of flow as is currently done. This greatly needed upgrade will ensure stability of operation of the sources that is needed to systematically obtain thin films with the same optical and structural properties. Moreover, the upgrade will reduce maintenance time and will increase throughput. The proposed upgrade will support research in the development of low stress interference coatings for adaptive optics and the development of high pulse energy, high repetition rate femtosecond lasers, both projects supported by the DoD ONR. Furthermore, it will contribute to expand our efforts in coatings research to ultrafast coatings which are far more demanding in fabrication

Document Details

Document Type
DoD Grant Award
Publication Date
Sep 11, 2020
Source ID
N000142012837

Entities

People

  • Carmen S. Menoni

Organizations

  • Colorado State University
  • Office of Naval Research
  • United States Navy

Tags

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Research Science/Academic Research
  • Semiconductor Device Technology

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene