GaN ferroelectgric high electron mobility transistor (FE-HEMT)

Abstract

As part of this seed program, we propose to develop the growth space for Ga-polar Sc(Al,Ga)N by MOCVD. Additionally, the full parame,ter space for growth of Ga-polar and N-polar Sc(Al,Ga)N will be established by MBE. The ferroelectricity of MBE-grown Sc(Al,Ga)N fil,ms with different thicknesses will be also investigated.Approved for Public Release

Document Details

Document Type
DoD Grant Award
Publication Date
Sep 03, 2022
Source ID
N000142212727

Entities

People

  • Elaheh Ahmadi

Organizations

  • Board of Regents of the University of Michigan
  • Office of Naval Research
  • United States Navy

Tags

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Space