Next Generation of Systems Enabled by Nanoscale Coatings
Abstract
For public releaseResearchers at Florida International University (FIU) are developing wearable sensors for health and environmental monitoring, high efficiency solar cells, quantum photonics, gas sensors, and 6G and THz communication. Fabrication of physical devices with superior performance is the aim of these projects and relies heavily on the available infrastructure around FIU. In order to achieve the state-of-the-art devices and to provide relevant hands-on fabrication experience to our students, investment in fabrication equipment is needed. For these purposes, we are requesting funding for an atomic layer deposition (ALD) tool to enhance the quality of the basic research at FIU and surrounding universities to develop state-of-the-art device for the Department of Defense and for workforce training in semiconductor fabrication. To the best of our knowledge, there is no shared user facility in South Florida with atomic layer deposition capabilities. Miniaturization has been the major driver for improvements in electronic devices; andas length scales of active layers approach atomic radii, the quality and roughness of these layers dominate performance. Uniform thickness of nano-scale layers is required for reproducible performance, and ALD is the method to deposit uniform, conformal, and stoichiometric nano-scale coatings. In addition, reduction in active layer thickness and interfacial effects lead to unique mechanical and electrical properties of the materials, which diverge from the bulk and enables novel devices. Advanced ALD tool will evolve theresearch in the several emerging applications: 1) flexible and reliable wearable monitoring devices, 2) photovoltaics, 3) photonic devices for quantum sensing, 4) energy storage, and 5) miniaturized devices for next-generation communication systems. The central motivation is to perform basic research that utilizes nanoscale coatings in a wide range of ongoing research to push the research from theoretical and proof-of-concept phase to record-breaking demonstrators and field deployment. In addition, this tool will have a profound impact on the fabrication capabilities for our students and will increase the variety of projects and courses available. Theproposed equipment will be available to other universities and industry researchers through FIU#s shared user cleanroom infrastructure. As the only academic plasma-enhanced and nitride-capable ALD tool in South Florida, we aim to significantly improve the nanofabrication capabilities of the region and reach a balance between theoretical and experimental tech growth in the area. Researchers atFIU have active research programs from Department of Defense, NASA, and NSF and an extensive team of graduate students, undergrads,visiting engineers and postdocs to utilize this tool for diverse set of activities. The proposed tool will also create next-generation nanotechnology workforce to address the challenges of future systems, with special emphasis on minority and underrepresented communities to promote diversity. As a minority serving institution with over 56,000 students, Florida International University produces a major fraction of diversity STEM workforce in the country. This tool will expose graduate and undergraduate students to nanoscience and nanoengineering for future system integration solutions, and not just semiconductor devices. Future and ongoing outreach programs at FIU that are related to STEM Engineer on Wheels, RET, REU, ROTC, diversity workforce development and others will have access to the tool and will immensely benefit from advanced nanofabrication capabilities.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Feb 06, 2023
- Source ID
- N000142312211
Entities
People
- Vladimir Pozdin
Organizations
- Florida International University
- Office of Naval Research
- United States Navy