Support for the 66th International Conference on Electron, Ion, and Photon Beam Technologies and Nanofabrication (EIPBN 23)

Abstract

This award supports student travel to attend the 66th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN), to be held in person at the Hilton San Francisco Union Square in San Francisco, California, from May 30th to June 2nd, 2023. The EIPBN Conference is recognized as the foremost international meeting dedicated to lithographic science and technology and its application to micro and nanofabrication. The conference brings together engineers and scientists from industries, universities, and government research laboratories to discuss recent progress and future trends. Attendance from students is a critical component of EIPBN, and they provide a fresh perspective and become the future scientists and leaders for the nanofabrication community. EIPBN has many student-centric activities, including student oral and poster presentations in the technical program, Career Mentoring Session, Student Breakfast, and Women in Nanofabrication Luncheon. Many of the student contributions are peer-reviewed and published in a special conference issue of the Journal of Vacuum Science and Technology B. The award from the Office of Naval Research(ONR) provides partial support for student travel from US universities and institutions.

Document Details

Document Type
DoD Grant Award
Publication Date
Jun 29, 2023
Source ID
N000142312546

Entities

People

  • Chih-Hao Chang

Organizations

  • Office of Naval Research
  • United States Navy
  • University of Texas at Austin

Tags

Fields of Study

  • Physics

Readers

  • Academic Conference Management
  • Nanofabrication and Microfabrication.
  • STEM Education

Technology Areas

  • Microelectronics