ScAlN-gated GaN high electron mobility transistor

Abstract

Project AbstractScAlN-gated GaN high electron mobility transistorsAs part of this program, we propose to develop the growth space for Ga-polar and N-polar ScAlN by molecular beam epitaxy and metalorganic chemical vapor deposition. The impact of growth conditions and strain on ferroelectricity of ScAlN will be investigated. ScAlN-gated GaN high electron mobility transistors will be fabricated and characterized.Approved for Public Release

Document Details

Document Type
DoD Grant Award
Publication Date
Oct 13, 2023
Source ID
N000142312880

Entities

People

  • Elaheh Ahmadi

Organizations

  • Office of Naval Research
  • United States Navy
  • University of California, Los Angeles

Tags

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Space