DURIP A New CVD/PVD Integrated System for Ultralow-Damping Magnetic Materials
Abstract
Magnetization damping, often characterized by the Gilbert damping constant, is the process by which the magnetization loses its coherence over time, causing the magnetization to decay and lose energy. Magnetic materials with ultralow damping are magnetic materials with long magnetization precession times. Ultralow-damping magnetic materials are pivotal in advancing technology by improving energy efficiency, speed, reliability, and performance in various applications, from electronics, sensors, and data storage to medical imaging and quantum computing. Yttrium iron garnet (YIG, Y3Fe5O12) and vanadium tetracyanoethylene films have the lowest Gilbert damping constants of 3~5×10-5, which are one or two orders of magnitude lower than many other magnetic materials. However, the deposition of high-crystalline quality epitaxial YIG films requires a high temperature of over 700 #C on a specific single-crystal substrateof gadolinium gallium garnet, which makes it extremely hard to integrate YIG films onto semiconductors. Vanadium tetracyanoethylenefilms can be deposited with a low-temperature (40~60 #C) chemical vapor deposition (CVD) onto nearly any substrates without epitaxygrowth. However, vanadium tetracyanoethylene films are susceptible to oxidization when exposed to air. No ultralow-damping magneticfilms are readily integrated into semiconductors, and new ultralow-damping magnetic materials need to be investigated. Here, we propose a new and unique custom-designed CVD/PVD (physical vapor deposition) system with a glovebox for exploring new ultralow-damping magnetic materials. The CVD system will be used for the deposition of vanadium tetracyanoethylene and other ultralow-damping magnetic films, which are not susceptible to oxidization, while PVD or sputtering deposition will be used for passivation, protection, and microfabrication of these films. Such ultralow-damping magnetic films with damping comparable to that in YIG and vanadium tetracyanoethylene, low-temperature deposition, easy integration, and not susceptible to oxidization when exposed to the air will enable a newgeneration of ultralow-damping magnetic materials that will revolutionize new integrated high-performance RF/Microwave magnetic devices (e.g., high-Q and low-insertion-loss bandpass and bandstop filters, frequency selective limiters, and antennas) for communications; new energy-efficient electronic, spintronic, magnonic, and orbitronic devices with less heating, lower noise, and better signalintegrity; new devices for quantum information science; significantly enhanced sensing and imaging with ultralow cost, size, weight, and power consumption.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Feb 24, 2025
- Source ID
- N000142512163
Entities
People
- Nian X. Sun
Organizations
- Northeastern University
- Office of Naval Research
- United States Navy