What is the Ultimate Limit of a Piezoelectric Acoustic Resonator
Abstract
The work consists of identifying the source of loss in piezoelectrically actuated resonators that limit their q to lower values than their capacity actuated counterparts. The main task of the study is to focus on the analysis and expansion of the theory presented in the technical rationale section, process development and fabrication of devices and focus on the measurement and acoustic characterizations.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Aug 05, 2016
- Source ID
- N00173161G022
Entities
People
- Mina Rais-zadeh
Organizations
- United States Naval Research Laboratory
- United States Navy
- University of Michigan