NICOP - Fabrication of THz folded waveguide circuit using X-ray LIGA technique
Abstract
Terahertz (THz) coherent radiation sources from vacuum electron devices are attractive for many military and civilian applications including high resolution real-time imaging radar (Vi-SAR), high data rate communications, security screening, medical diagnostic, and food inspection systems. High Power Microwave Engineering Laboratory of the Kwangwoon University (KWU) proposes the development of a 3-dimensional multi-step micro-fabrication technique for accurately fabricating a 850 GHz folded waveguide TWT circuit using high energy X-ray LIGA processes. The deep X-ray lithography with a synchrotron radiation source has a large depth of penetration in material and has the enormous potential for fabricating THz TWT circuits with extreme resolution and very high aspect ratio, which is unmatched by any other technology. The proposed 3-dimensional multi-step X-ray LIGA will be developed in collaboration with Pohang Accelerator Laboratory in South Korea and the US Naval Research Laboratory in Washington DC.
Document Details
- Document Type
- DoD Grant Award
- Publication Date
- Aug 12, 2016
- Source ID
- N629091512059
Entities
People
- Jin Joo Choi
Organizations
- Kwangwoon University
- Office of Naval Research
- United States Navy